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UCSB RESEARCHER RECEIVES PETER MARK AWARD

Wednesday, September 1, 1999 - 17:00
Santa Barbara, CA

Eray S. Aydil, associate professor of chemical engineering, at the University of California, Santa Barbara, has

received the Peter Mark Memorial Award from the American Vacuum Society.

The award honors the memory of Peter Mark, who served as editor of the Journal of Vacuum Science and Technology from 1975 until his death in 1979. It recognizes outstanding theoretical or experimental work by a young scientist or engineer.

Fellow scientists will honor Aydil during the group's 46th Annual International Symposium this October in Seattle.

The society cited Aydil for his "pioneering work in the development and application of optical diagnostic techniques to understand the chemistry and physics associated with plasma deposition of dielectric thin films."

"Your selection reflects the quality and impact your work has had in vacuum science and technology over the years," said society officials.

Earlier this year, Aydil's research received nearly $57,000 from the UC-SMART Program, a partnership between the UC system and the California semiconductor industry that supports research and education in next generation semiconductor manufacturing through matching grants.

The program matched funds from Lam Research Corporation, which already has donated $60,000 and equipment worth $330,000 to the project.

Aydil earned a Ph.D. chemical engineering from the University of Houston. Before joining the UC Santa Barbara faculty in 1993, he worked as a postdoctoral member of technical staff at AT&T Bell Laboratories. There, he focused on developing and applying surface sensitive diagnostic techniques that can be used in the harsh conditions encountered in plasma etching and deposition reactors.

The associate professor has received the National Young Investigator Award from the National Science Foundation (1994) and the Camille and Henry Dreyfus Teacher-Scholar Award (1997). In 1996 and 1999, UC Santa Barbara chemical engineering students selected him as their Professor of the Year. Aydil has published more than 60 papers, holds four patents and has given more than 90 invited and contributed presentations on his research work.

He holds memberships in several professional organizations. This year, he served on the programming committee of the vacuum society's Plasma Science and Technology Division and was program chairman of the Electronic and Photonic Materials Division of the American Institute of Chemical Engineers.

The American Vacuum Society is a non-profit organization, which promotes communication, dissemination of knowledge, recommended practices, research, and education in the use of vacuum and other controlled environments to develop new materials, process technology, devices, and related understanding of material properties for the betterment of humanity. Editors: A J-peg image of Eray Aydil is available on request.

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